著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Jae-Min Kim and Han-Bo-Ram Lee and Clement Lansalot and Christian Dussarrat and Julien Gatineau and Hyungjun Kim,Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2010-05-01,49,5S2,05FA10,https://cir.nii.ac.jp/crid/1360003446855454464,https://doi.org/10.1143/jjap.49.05fa10