著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masahito Niibe and Takuya Kotaka and Retsuo Kawakami and Yoshitaka Nakano and Takeshi Inaoka and Kikuo Tominaga and Takashi Mukai,Damage Analysis of n-GaN Crystal Etched with He and N<sub>2</sub> Plasmas,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2013-01-01,52,1S,01AF04,https://cir.nii.ac.jp/crid/1360003449886208256,https://doi.org/10.7567/jjap.52.01af04