著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Xiuyu Zhang and Yuji Togano and Kentaro Hashimura and Masato Morifuji and Masahiko Kondow,Dry etching of Al-rich AlGaAs with silicon nitride masks for photonic crystal fabrication,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2015-03-06,54,4,042003,https://cir.nii.ac.jp/crid/1360003449889823872,https://doi.org/10.7567/jjap.54.042003