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High resolution characterizations of fine structure of semiconductor device and material using scanning nonlinear dielectric microscopy
Bibliographic Information
- Published
- 2017-09-06
- Resource Type
- journal article
- Rights Information
-
- http://iopscience.iop.org/info/page/text-and-data-mining
- http://iopscience.iop.org/page/copyright
- DOI
-
- 10.7567/jjap.56.100101
- Publisher
- IOP Publishing
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Journal
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 56 (10), 100101-, 2017-09-06
IOP Publishing
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Details 詳細情報について
-
- CRID
- 1360003449891297536
-
- NII Article ID
- 210000148306
-
- ISSN
- 13474065
- 00214922
-
- Article Type
- journal article
-
- Data Source
-
- Crossref
- CiNii Articles
- KAKEN
