著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Retsuo Kawakami and Masahito Niibe and Yoshitaka Nakano and Ryo Tanaka and Chisato Azuma and Takashi Mukai,Characteristics of N<sub>2</sub> and O<sub>2</sub> Plasma‐Induced Damages on AlGaN Thin Film Surfaces,physica status solidi (a),1862-6300,Wiley,2017-09-05,214,11,,https://cir.nii.ac.jp/crid/1360004230276767232,https://doi.org/10.1002/pssa.201700393