{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360004232369375488.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1016/j.memsci.2016.11.067"}},{"identifier":{"@type":"URI","@value":"https://api.elsevier.com/content/article/PII:S0376738816311772?httpAccept=text/xml"}},{"identifier":{"@type":"URI","@value":"https://api.elsevier.com/content/article/PII:S0376738816311772?httpAccept=text/plain"}}],"resourceType":"学術雑誌論文(journal article)","dc:title":[{"@value":"Atmospheric-pressure plasma-enhanced chemical vapor deposition of microporous silica membranes for gas separation"}],"description":[{"notation":[{"@value":"Abstract   Microporous silica membranes with high permselectivity are fabricated by atmospheric-pressure plasma-enhanced chemical vapor deposition (AP-PECVD) using hexamethyldisiloxane as the precursor in plasma working gases of pure argon, and mixture of argon with oxygen or nitrogen. A silica membrane grown using plasma composed of a mixture of argon and nitrogen displays highly efficient gas separation, with selectivities for He/N 2  and He/SF 6  of 196 and 820, respectively, and He permeance of 1.1×10 −7  mol m −2  s −1  Pa −1  at 50 °C. Characterization of the membranes by FTIR and X-ray photoelectron spectroscopies reveals a relatively high concentration of carbon remains in the membrane grown using a mixture of argon and nitrogen. Annealing at elevated temperature after plasma deposition improves the permselectivity of the membranes. After annealing at 300 °C, the permeance of He at 50 °C increased to 4.0×10 -7  mol m -2  s -1  Pa -1  with no marked decrease of selectivity (He/N 2  =98, He/SF 6  =770). The annealed membrane also exhibits remarkable permselectivity for CO 2 , showing selectivities for CO 2 /N 2  and CO 2 /CH 4  of 46 and 166, respectively, with CO 2  permeance of 1.9×10 -7  mol m -2  s -1  Pa -1  at 50 °C. AP-PECVD shows great promise to fabricate microporous silica membranes highly permselective for gas separation."}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420001326219709440","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"30633937"},{"@type":"NRID","@value":"1000030633937"},{"@type":"NRID","@value":"9000283865379"},{"@type":"NRID","@value":"9000396248587"},{"@type":"NRID","@value":"9000261649279"},{"@type":"NRID","@value":"9000016415417"},{"@type":"NRID","@value":"9000283854172"},{"@type":"NRID","@value":"9000345273636"},{"@type":"NRID","@value":"9000399761973"},{"@type":"NRID","@value":"9000283811580"},{"@type":"NRID","@value":"9000399220454"},{"@type":"NRID","@value":"9000257863574"},{"@type":"NRID","@value":"9000283861945"},{"@type":"NRID","@value":"9000301746728"},{"@type":"NRID","@value":"9000398143643"},{"@type":"NRID","@value":"9000406309528"},{"@type":"NRID","@value":"9000405671062"},{"@type":"NRID","@value":"9000257863606"},{"@type":"NRID","@value":"9000240037199"},{"@type":"NRID","@value":"9000257863571"},{"@type":"NRID","@value":"9000399220442"},{"@type":"NRID","@value":"9000404345739"},{"@type":"NRID","@value":"9000283865434"},{"@type":"NRID","@value":"9000283861951"},{"@type":"NRID","@value":"9000018650059"},{"@type":"NRID","@value":"9000390408517"},{"@type":"NRID","@value":"9000257863554"},{"@type":"NRID","@value":"9000258680135"},{"@type":"NRID","@value":"9000398153859"},{"@type":"NRID","@value":"9000258679154"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/hiroki_nagasawa"}],"foaf:name":[{"@value":"Hiroki 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Kanezashi"}]},{"@id":"https://cir.nii.ac.jp/crid/1380004232369375490","@type":"Researcher","foaf:name":[{"@value":"Tomohisa Yoshioka"}]},{"@id":"https://cir.nii.ac.jp/crid/1420001326217922816","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"20201642"},{"@type":"NRID","@value":"1000020201642"},{"@type":"NRID","@value":"9000000062352"},{"@type":"NRID","@value":"9000000554541"},{"@type":"NRID","@value":"9000016414998"},{"@type":"NRID","@value":"9000021609933"},{"@type":"NRID","@value":"9000405633729"},{"@type":"NRID","@value":"9000020815559"},{"@type":"NRID","@value":"9000345273638"},{"@type":"NRID","@value":"9000020869232"},{"@type":"NRID","@value":"9000021294096"},{"@type":"NRID","@value":"9000398129915"},{"@type":"NRID","@value":"9000267787774"},{"@type":"NRID","@value":"9000398143641"},{"@type":"NRID","@value":"9000267773605"},{"@type":"NRID","@value":"9000240037201"},{"@type":"NRID","@value":"9000399220437"},{"@type":"NRID","@value":"9000020815574"},{"@type":"NRID","@value":"9000007027618"},{"@type":"NRID","@value":"9000404345742"},{"@type":"NRID","@value":"9000007027505"},{"@type":"NRID","@value":"9000405713229"},{"@type":"NRID","@value":"9000242109110"},{"@type":"NRID","@value":"9000020836029"},{"@type":"NRID","@value":"9000398153862"},{"@type":"NRID","@value":"9000398154109"},{"@type":"NRID","@value":"9000267773601"},{"@type":"NRID","@value":"9000020787877"},{"@type":"NRID","@value":"9000021284155"},{"@type":"NRID","@value":"9000366513998"},{"@type":"NRID","@value":"9000356583155"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/read_ToshinoriTsuru"}],"foaf:name":[{"@value":"Toshinori Tsuru"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"03767388"}],"prism:publicationName":[{"@value":"Journal of Membrane Science"}],"dc:publisher":[{"@value":"Elsevier BV"}],"prism:publicationDate":"2017-02","prism:volume":"524","prism:startingPage":"644","prism:endingPage":"651"},"reviewed":"false","dc:rights":["https://www.elsevier.com/tdm/userlicense/1.0/","https://www.elsevier.com/legal/tdmrep-license","http://www.elsevier.com/open-access/userlicense/1.0/","https://doi.org/10.15223/policy-017","https://doi.org/10.15223/policy-037","https://doi.org/10.15223/policy-012","https://doi.org/10.15223/policy-029","https://doi.org/10.15223/policy-004"],"url":[{"@id":"https://api.elsevier.com/content/article/PII:S0376738816311772?httpAccept=text/xml"},{"@id":"https://api.elsevier.com/content/article/PII:S0376738816311772?httpAccept=text/plain"}],"createdAt":"2016-11-27","modifiedAt":"2025-10-07","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=Materials%20Science(all)","dc:title":"Materials Science(all)"},{"@id":"https://cir.nii.ac.jp/all?q=Filtration%20and%20Separation","dc:title":"Filtration and Separation"},{"@id":"https://cir.nii.ac.jp/all?q=Physical%20and%20Theoretical%20Chemistry","dc:title":"Physical and Theoretical Chemistry"},{"@id":"https://cir.nii.ac.jp/all?q=Biochemistry","dc:title":"Biochemistry"}],"project":[{"@id":"https://cir.nii.ac.jp/crid/1040000781833534080","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"15H05553"},{"@type":"JGN","@value":"JP15H05553"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-15H05553/"}],"notation":[{"@language":"ja","@value":"有機無機ハイブリッドシリカ膜の大気圧プラズマ重合製膜"},{"@language":"en","@value":"Fabrication of organic/inorganic hybrid silica membranes via atmospheric-pressure 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