著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tatsuya Nishikawa and Norihito Abe and Akira Yonesu and Nobuya Hayashi,Sterilization of small vial using electron cyclotron resonance plasma,Vacuum,0042-207X,Elsevier BV,2018-11,157,,100-104,https://cir.nii.ac.jp/crid/1360004232548137216,https://doi.org/10.1016/j.vacuum.2018.06.069