Mechanical analysis and optimization of a microcantilever sensor coated with a solid receptor film
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- Genki Yoshikawa
- National Institute for Materials Science (NIMS) International Center for Materials Nanoarchitectonics (MANA), , 1-1 Namiki, Tsukuba 305-0044, Japan
Description
<jats:p>This letter presents an analytical model for the static deflection and optimization of a nanomechanical cantilever sensor coated with a solid receptor film. All relevant physical parameters of both cantilever and coating film are included; Young’s modulus, Poisson’s ratio, and geometrical parameters (length, width, and thickness). This model provides accurate values verified by a good agreement with those simulated by finite element analysis, while the Stoney’s equation [G. G. Stoney, Proc. R. Soc. London, Ser. A 82, 172 (1909)] and Sader’s model [J. E. Sader, J. Appl. Phys. 89, 2911 (2001)] which assume ideal surface stress without a solid coating film, result in significant deviation under some conditions. Mechanical analysis and optimization based on experimental results are also demonstrated as an example.</jats:p>
Journal
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- Applied Physics Letters
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Applied Physics Letters 98 (17), 173502-, 2011-04-25
AIP Publishing
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Details 詳細情報について
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- CRID
- 1360004233895087744
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- ISSN
- 10773118
- 00036951
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- Data Source
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- Crossref
- KAKEN
