{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360004233920232192.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1063/1.4977778"}},{"identifier":{"@type":"URI","@value":"https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/1.4977778/14493334/091908_1_online.pdf"}}],"resourceType":"学術雑誌論文(journal article)","dc:title":[{"@value":"Extremely low thermal conductivity of high density and ordered 10 nm-diameter silicon nanowires array"}],"description":[{"type":"abstract","notation":[{"@value":"<jats:p>We present the fabrication and thermal conductivity of a high-density and ordered 10 nm-diameter Si nanowires (SiNWs) array for thermoelectric devices, realized through the use of a bio-template mask as well as neutral beam etching techniques. The SiNWs were embedded into spin-on-glass (SoG) to measure the thermal conductivity of the SiNWs-SoG composites. By decreasing the thickness of SiNWs-SoG composites from 100 nm to 30 nm, the thermal conductivity was drastically decreased from 1.8 ± 0.3 W m−1 K−1 to 0.5 ± 0.1 W m−1 K−1. Moreover, when the electrical conductivities of 100 nm-long SiNWs were 1.7 × 10 S m−1, 6.5 × 103 S m−1 and 1.3 × 105 S m−1, their thermal conductivities of SiNWs-SoG composites were 1.8 ± 0.3 W m−1 K−1, 1.6 ± 0.2 W m−1 K−1 and 0.7 ± 0.2 W m−1 K−1, respectively. The cross-plane thermal conductivity of the fabricated 10 nm diameter SiNWs-SoG composites was dependent on their thickness and the electrical conductivity of SiNWs, which were significantly decreased from bulk.</jats:p>"}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1380004233920232320","@type":"Researcher","foaf:name":[{"@value":"Akiou Kikuchi"}],"jpcoar:affiliationName":[{"@value":"Tohoku University 1 Graduate School of Engineering, , 6-6-01 Aramaki Aoba, Aoba-ku, Sendai 980-8579, Japan"},{"@value":"Central Glass Co. Ltd. 2 , 5253Okiube, Ube City, Yamaguchi 755-0001, Japan"},{"@value":"Tohoku University 3 Institute of Fluid Science, , 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan"}]},{"@id":"https://cir.nii.ac.jp/crid/1380004233920232322","@type":"Researcher","foaf:name":[{"@value":"Akifumi Yao"}],"jpcoar:affiliationName":[{"@value":"Central Glass Co. 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