Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tetsuya Miyazawa and Yu Kano and Yasuo Nakayama and Kenichi Ozawa and Toshiharu Iga and Misao Yamanaka and Ayako Hashimoto and Takashi Kikuchi and Kazuhiko Mase,Improved pumping speeds of oxygen-free palladium/titanium nonevaporable getter coatings and suppression of outgassing by baking under oxygen,"Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films",0734-2101,American Vacuum Society,2019-01-09,37,2,02160,https://cir.nii.ac.jp/crid/1360004235870002944,https://doi.org/10.1116/1.5074160