著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Genki Yoshikawa and Terunobu Akiyama and Frederic Loizeau and Kota Shiba and Sebastian Gautsch and Tomonobu Nakayama and Peter Vettiger and Nico F. de Rooij and Masakazu Aono,Two Dimensional Array of Piezoresistive Nanomechanical Membrane-Type Surface Stress Sensor (MSS) with Improved Sensitivity,Sensors,1424-8220,MDPI AG,2012-11-16,12,11,15873-15887,https://cir.nii.ac.jp/crid/1360004239517528960,https://doi.org/10.3390/s121115873