{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360005744333480192.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.3390/s19235289"}},{"identifier":{"@type":"URI","@value":"https://www.mdpi.com/1424-8220/19/23/5289/pdf"}},{"identifier":{"@type":"PMID","@value":"31805630"}}],"resourceType":"学術雑誌論文(journal article)","dc:title":[{"@value":"Optical Sensors for Multi-Axis Angle and Displacement Measurement Using Grating Reflectors"}],"description":[{"type":"abstract","notation":[{"@value":"<jats:p>In dimensional metrology it is necessary to carry out multi-axis angle and displacement measurement for high-precision positioning. Although the state-of-the-art linear displacement sensors have sub-nanometric measurement resolution, it is not easy to suppress the increase of measurement uncertainty when being applied for multi-axis angle and displacement measurement due to the Abbe errors and the influences of sensor misalignment. In this review article, the state-of-the-art multi-axis optical sensors, such as the three-axis autocollimator, the three-axis planar encoder, and the six-degree-of-freedom planar encoder based on a planar scale grating are introduced. With the employment of grating reflectors, measurement of multi-axis translational and angular displacement can be carried out while employing a single laser beam. Fabrication methods of a large-area planar scale grating based on a single-point diamond cutting with the fast tool servo technique and the interference lithography are also presented, followed by the description of the evaluation method of the large-area planar scale grating based on the Fizeau interferometer.</jats:p>"}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1420001326235217152","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"70606384"},{"@type":"NRID","@value":"1000070606384"},{"@type":"ORCID","@value":"0000-0003-3527-2869"},{"@type":"CINII_AUTHOR_ID","@value":"DB00284834"},{"@type":"URI","@value":"https://ci.nii.ac.jp/author/DB00284834#entity"},{"@type":"URI","@value":"https://viaf.org/viaf/NII%7CDB00284834"},{"@type":"NRID","@value":"9000002961610"},{"@type":"NRID","@value":"9000310317193"},{"@type":"NRID","@value":"9000390887993"},{"@type":"NRID","@value":"9000285966349"},{"@type":"NRID","@value":"9000305613045"},{"@type":"NRID","@value":"9000345266495"},{"@type":"NRID","@value":"9000345284025"},{"@type":"NRID","@value":"9000398606934"},{"@type":"NRID","@value":"9000272997284"},{"@type":"NRID","@value":"9000021518068"},{"@type":"NRID","@value":"9000310317025"},{"@type":"NRID","@value":"9000345283995"},{"@type":"NRID","@value":"9000403165537"},{"@type":"NRID","@value":"9000020071488"},{"@type":"NRID","@value":"9000406355771"},{"@type":"NRID","@value":"9000258645582"},{"@type":"NRID","@value":"9000272997274"},{"@type":"NRID","@value":"9000305613074"},{"@type":"NRID","@value":"9000310317175"},{"@type":"NRID","@value":"9000310317030"},{"@type":"NRID","@value":"9000283824595"},{"@type":"NRID","@value":"9000347193915"},{"@type":"NRID","@value":"9000345283378"},{"@type":"NRID","@value":"9000398793941"},{"@type":"NRID","@value":"9000283809675"},{"@type":"NRID","@value":"9000398612023"},{"@type":"NRID","@value":"9000006234415"},{"@type":"NRID","@value":"9000310317347"},{"@type":"NRID","@value":"9000310317199"},{"@type":"NRID","@value":"9000390887917"},{"@type":"NRID","@value":"9000272997269"},{"@type":"NRID","@value":"9000272997263"},{"@type":"NRID","@value":"9000390887932"},{"@type":"NRID","@value":"9000283806964"},{"@type":"NRID","@value":"9000409507610"},{"@type":"NRID","@value":"9000317140447"},{"@type":"NRID","@value":"9000310317351"},{"@type":"NRID","@value":"9000310317033"},{"@type":"NRID","@value":"9000272997223"},{"@type":"NRID","@value":"9000002623584"},{"@type":"NRID","@value":"9000305613053"},{"@type":"NRID","@value":"9000310316978"},{"@type":"NRID","@value":"9000412564953"},{"@type":"NRID","@value":"9000398793962"},{"@type":"NRID","@value":"9000257762976"},{"@type":"NRID","@value":"9000020139490"},{"@type":"NRID","@value":"9000390887928"},{"@type":"NRID","@value":"9000390888036"},{"@type":"NRID","@value":"9000010229977"},{"@type":"NRID","@value":"9000305613064"},{"@type":"NRID","@value":"9000242903391"},{"@type":"NRID","@value":"9000310316996"},{"@type":"NRID","@value":"9000390887754"},{"@type":"NRID","@value":"9000390887923"},{"@type":"NRID","@value":"9000014578632"},{"@type":"NRID","@value":"9000305613080"},{"@type":"NRID","@value":"9000310317185"},{"@type":"NRID","@value":"9000249866776"},{"@type":"NRID","@value":"9000310317171"},{"@type":"NRID","@value":"9000310316987"},{"@type":"NRID","@value":"9000390888103"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/yukishimizu"}],"foaf:name":[{"@value":"Yuki Shimizu"}],"jpcoar:affiliationName":[{"@value":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"}]},{"@id":"https://cir.nii.ac.jp/crid/1380582244479649177","@type":"Researcher","foaf:name":[{"@value":"Hiraku Matsukuma"}],"jpcoar:affiliationName":[{"@value":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"}]},{"@id":"https://cir.nii.ac.jp/crid/1380582244479649306","@type":"Researcher","foaf:name":[{"@value":"Wei Gao"}],"jpcoar:affiliationName":[{"@value":"Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"14248220"}],"prism:publicationName":[{"@value":"Sensors"}],"dc:publisher":[{"@value":"MDPI 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