著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Andrea Mazzalai and Davide Balma and Nachiappan Chidambaram and Ramin Matloub and Paul Muralt,Characterization and Fatigue of the Converse Piezoelectric Effect in PZT Films for MEMS Applications,Journal of Microelectromechanical Systems,1057-7157,Institute of Electrical and Electronics Engineers (IEEE),2015-08,24,4,831-838,https://cir.nii.ac.jp/crid/1360011144004391808,https://doi.org/10.1109/jmems.2014.2353855