著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
D.M. Freeman and A.J. Aranysi and M.J. Gordon and S.S. Hong,Multidimensional Motion Analysis of MEMS Using Computer Microvision,"1998 Solid-State, Actuators, and Microsystems Workshop Technical Digest",,"Transducer Research Foundation, Inc.",1998-06-08,,,,https://cir.nii.ac.jp/crid/1360011144083700352,https://doi.org/10.31438/trf.hh1998.33