著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
T. Kunioka and Y. Takeda and T. Matsuda and N. Shimazu and Y. Nakayama,<i>XY</i> stage driven by ultrasonic linear motors for the electron-beam x-ray mask writer EB-X3,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,1999-11-01,17,6,2917-2920,https://cir.nii.ac.jp/crid/1360011144927799168,https://doi.org/10.1116/1.591096