Thermal and ambient-induced deflections of scanning force microscope cantilevers

DOI PDF 被引用文献18件
  • T. Thundat
    Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123
  • R. J. Warmack
    Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123
  • G. Y. Chen
    Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123
  • D. P. Allison
    Oak Ridge National Laboratory, Oak Ridge, Tennessee 37831-6123

書誌事項

公開日
1994-05-23
DOI
  • 10.1063/1.111407
公開者
AIP Publishing

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説明

<jats:p>The deflection of scanning force microscope cantilevers, metal coated on one side, is significantly influenced by both thermal heating and variations in relative humidity. For constant relative humidity, the deflection of the cantilever drifts due to laser heating and eventually reaches a steady-state value. For a thermally stabilized cantilever, the deflection varies linearly with relative humidity. Exposure to other vapors, such as mercury, changes the inherent deflection of the cantilever. Relative amounts of adsorbates on the cantilever can be estimated from shifts in the cantilever resonance frequency with picogram mass resolution. The cantilever deflection as well as changes in resonance frequency due to vapor adsorption can be used as basis for novel chemical sensors.</jats:p>

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