Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Sergei Zarubin and Elena Suvorova and Maksim Spiridonov and Dmitrii Negrov and Anna Chernikova and Andrey Markeev and Andrei Zenkevich,Fully ALD-grown TiN/Hf0.5Zr0.5O2/TiN stacks: Ferroelectric and structural properties,Applied Physics Letters,0003-6951,AIP Publishing,2016-11-07,109,19,192903,https://cir.nii.ac.jp/crid/1360011145811095296,https://doi.org/10.1063/1.4966219