著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) A.R. Krauss and O. Auciello and D.M. Gruen and A. Jayatissa and A. Sumant and J. Tucek and D.C. Mancini and N. Moldovan and A. Erdemir and D. Ersoy and M.N. Gardos and H.G. Busmann and E.M. Meyer and M.Q. Ding,Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices,Diamond and Related Materials,0925-9635,Elsevier BV,2001-11,10,11,1952-1961,https://cir.nii.ac.jp/crid/1360011146028197504,https://doi.org/10.1016/s0925-9635(01)00385-5