Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) J.L. Tian and Gui Gen Wang and Hua Yu Zhang,Effect of Annealing Atmosphere on the Structural and Optical Properties of ZnO Thin Films on Si (100) Substrates Grown by Atomic Layer Deposition,Journal of Nano Research,1661-9897,"Trans Tech Publications, Ltd.",2015-12,37,,92-98,https://cir.nii.ac.jp/crid/1360013173026932352,https://doi.org/10.4028/www.scientific.net/jnanor.37.92