Evaluation of Intrinsic Gettering of Gold by Oxide Precipitation in Czochralski Silicon

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Published
1988-03-01
Rights Information
  • https://iopscience.iop.org/page/copyright
  • https://iopscience.iop.org/info/page/text-and-data-mining
DOI
  • 10.1149/1.2095716
Publisher
The Electrochemical Society

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