著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Kenneth R. Shoulders,Microelectronics Using Electron-Beam-Activated Machining Techniques,Advances in Computers,0065-2458,Elsevier,1961,2,,135-293,https://cir.nii.ac.jp/crid/1360016867106968448,https://doi.org/10.1016/s0065-2458(08)60142-4