著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Lei Yang and Franco Cerrina and James W. Taylor,Bright peak enhanced x-ray clear phase mask,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,2002-01-01,20,1,250-256,https://cir.nii.ac.jp/crid/1360016869045840128,https://doi.org/10.1116/1.1434973