著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yuan Lu and Markus Reusch and Nicolas Kurz and Anli Ding and Tim Christoph and Mario Prescher and Lutz Kirste and Oliver Ambacher and Agnė Žukauskaitė,Elastic modulus and coefficient of thermal expansion of piezoelectric Al<sub>1−x</sub>Sc<sub>x</sub>N (up to x = 0.41) thin films,APL Materials,2166-532X,AIP Publishing,2018-07,6,7,076105,https://cir.nii.ac.jp/crid/1360017284683078144,https://doi.org/10.1063/1.5040190