著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tzu-Ling Liu and Stacey F. Bent,Area-Selective Atomic Layer Deposition on Chemically Similar Materials: Achieving Selectivity on Oxide/Oxide Patterns,Chemistry of Materials,0897-4756,American Chemical Society (ACS),2021-01-08,33,2,513-523,https://cir.nii.ac.jp/crid/1360017284961034752,https://doi.org/10.1021/acs.chemmater.0c03227