著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Takanori Akita and Yuki Otsuka and Masanori Hayase,Microfluidic Device for In Situ Observation of Bottom-Up Copper Electrodeposition in a TSV-Like Structure,Journal of The Electrochemical Society,0013-4651,The Electrochemical Society,2020-12-01,167,16,162515,https://cir.nii.ac.jp/crid/1360018682812390272,https://doi.org/10.1149/1945-7111/abd453