Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Ren Aoki and Keita Katayama and Daisuke Nakamura and Hisato Yabuta and Hiroshi Ikenoue and Taizoh Sadoh,Ultra-High Concentration Doping by Excimer Laser Annealing Using Solid-Diffusion Source,Extended Abstracts of the 2023 International Conference on Solid State Devices and Materials,,The Japan Society of Applied Physics,2023-09-07,,,,https://cir.nii.ac.jp/crid/1360021391878384256,https://doi.org/10.7567/ssdm.2023.ps-11-09