著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
T. Imamura and T. Koshikawa and M. Katayama,Transverse mode electrostatic microactuator for MEMS-based HDD slider,Proceedings of Ninth International Workshop on Micro Electromechanical Systems,,IEEE,,,,216-221,https://cir.nii.ac.jp/crid/1360022497213250432,https://doi.org/10.1109/memsys.1996.493983