Development of High-flux Ion Source for Size-selected Nanocluster Ions Based on High-power Impulse Magnetron Sputtering

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  • Hironori Tsunoyama
    Department of Chemistry, Faculty of Science and Technology, Keio University
  • Chuhang Zhang
    Department of Chemistry, Faculty of Science and Technology, Keio University
  • Hiroki Akatsuka
    Department of Chemistry, Faculty of Science and Technology, Keio University
  • Hiroki Sekiya
    Department of Chemistry, Faculty of Science and Technology, Keio University
  • Tomomi Nagase
    Department of Chemistry, Faculty of Science and Technology, Keio University
  • Atsushi Nakajima
    Department of Chemistry, Faculty of Science and Technology, Keio University

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Description

<jats:title>Abstract</jats:title> <jats:p>In this study, we have developed a highly intensive ion source of size-selected nanoclusters based on a high-power impulse magnetron sputtering method. The maximum intensity of the size-selected silver nanocluster anions exceeded that of standard ion sources by more than ten times. The high intensity in the present method was achieved by the high throughput of the ion optics and the high ionization fraction. Fine tuning of the nanocluster size distributions was also demonstrated.</jats:p>

Journal

  • Chemistry Letters

    Chemistry Letters 42 (8), 857-859, 2013-08

    Oxford University Press (OUP)

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