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Dependence of Gettering Efficiency on Metal Impurities
Bibliographic Information
- Published
- 1989-04-01
- Rights Information
-
- https://iopscience.iop.org/page/copyright
- https://iopscience.iop.org/info/page/text-and-data-mining
- DOI
-
- 10.1143/jjap.28.l519
- Publisher
- IOP Publishing
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Description
<jats:p> The dependence of gettering efficiency on metal impurities was investigated by means of an intentional contaminating method using Ni or Fe and the MOS C-t method with an eye to using gettering techniques appropriately. The results showed that Ni is easily gettered but Fe is not. Therefore, as a second step, the condition improving gettering efficiency for Fe was investigated. It was consequently found that adding heat treatment at low temperature to the final heat cycle is effective for gettering of Fe. </jats:p>
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 28 (4A), L519-, 1989-04-01
IOP Publishing
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Details 詳細情報について
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- CRID
- 1360284921816761344
-
- NII Article ID
- 210000028608
-
- ISSN
- 13474065
- 00214922
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- Data Source
-
- Crossref
- CiNii Articles
