著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Akira Yonesu and Kazufumi Hara and Tatsuya Nishikawa and Nobuya Hayashi,Characteristics of surface sterilization using electron cyclotron resonance plasma,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2016-06-27,55,7S2,07LG08,https://cir.nii.ac.jp/crid/1360284924867387648,https://doi.org/10.7567/jjap.55.07lg08