著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Akio Ohta and Mitsuhisa Ikeda and Katsunori Makihara and Seiichi Miyazaki,Evaluation of energy distribution of filled defects of Si oxide thin films from total photoelectron yield spectroscopy,Microelectronic Engineering,0167-9317,Elsevier BV,2017-06,178,,85-88,https://cir.nii.ac.jp/crid/1360285707343957504,https://doi.org/10.1016/j.mee.2017.05.001