収録刊行物
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- Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 31 (6), 061202-, 2013-11
American Vacuum Society
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キーワード
詳細情報 詳細情報について
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- CRID
- 1360285710846427520
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- ISSN
- 21662754
- 21662746
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- データソース種別
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- Crossref
- KAKEN