著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sven Stauss and Shusaku Mori and Hitoshi Muneoka and Kazuo Terashima and Francesca Iacopi,Ashing of photoresists using dielectric barrier discharge cryoplasmas,"Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena",2166-2746,American Vacuum Society,2013-11,31,6,061202,https://cir.nii.ac.jp/crid/1360285710846427520,https://doi.org/10.1116/1.4825202