著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Linghan Chen and Daisuke Ando and Yuji Sutou and Shinji Yokogawa and Junichi Koike,Liner- and barrier-free NiAl metallization: A perspective from TDDB reliability and interface status,Applied Surface Science,0169-4332,Elsevier BV,2019-12,497,,143810,https://cir.nii.ac.jp/crid/1360286991619629440,https://doi.org/10.1016/j.apsusc.2019.143810