著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
R. L. Bruce and S. Engelmann and T. Lin and T. Kwon and R. J. Phaneuf and G. S. Oehrlein and B. K. Long and C. G. Willson and J. J. Végh and D. Nest and D. B. Graves and A. Alizadeh,Study of ion and vacuum ultraviolet-induced effects on styrene- and ester-based polymers exposed to argon plasma,"Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena",1071-1023,American Vacuum Society,2009-05-01,27,3,1142-1155,https://cir.nii.ac.jp/crid/1360292619976221312,https://doi.org/10.1116/1.3136864