Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Vincent Linder and Byron D. Gates and Declan Ryan and Babak A. Parviz and George M. Whitesides,Water‐Soluble Sacrificial Layers for Surface Micromachining,Small,1613-6810,Wiley,2005-06-08,1,7,730-736,https://cir.nii.ac.jp/crid/1360292620043282048,https://doi.org/10.1002/smll.200400159