著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sang-Woo Kang and Sang-Ho Han and Shi-Woo Rhee,"(hfac)Cu(I)(MP) (hfac=hexafluoroacetylacetonate, MP=4-methyl-1-pentene) and (hfac)Cu(I)(DMB) (DMB=3,3-dimethyl-1-butene) for the chemical vapor deposition of copper film",Thin Solid Films,0040-6090,Elsevier BV,1999-08,350,1-2,10-13,https://cir.nii.ac.jp/crid/1360292620133460608,https://doi.org/10.1016/s0040-6090(99)00346-6