著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Mirko Holler and Manuel Guizar-Sicairos and Esther H. R. Tsai and Roberto Dinapoli and Elisabeth Müller and Oliver Bunk and Jörg Raabe and Gabriel Aeppli,High-resolution non-destructive three-dimensional imaging of integrated circuits,Nature,0028-0836,Springer Science and Business Media LLC,2017-03,543,7645,402-406,https://cir.nii.ac.jp/crid/1360292620482202368,https://doi.org/10.1038/nature21698