Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Y. Kumagai and T. Yamane and T. Miyaji and H. Murakami and Y. Kangawa and A. Koukitu,Hydride vapor phase epitaxy of AlN: thermodynamic analysis of aluminum source and its application to growth,physica status solidi (c),1610-1634,Wiley,2003-11-24,,7,2498-2501,https://cir.nii.ac.jp/crid/1360292620676456064,https://doi.org/10.1002/pssc.200303360