{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360294646199713664.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1038/micronano.2017.59"}},{"identifier":{"@type":"URI","@value":"https://www.nature.com/articles/micronano201759.pdf"}},{"identifier":{"@type":"URI","@value":"https://www.nature.com/articles/micronano201759"}},{"identifier":{"@type":"URI","@value":"http://www.nature.com/articles/micronano201759"}}],"dc:title":[{"@value":"Monolithic ultrasound fingerprint sensor"}],"description":[{"type":"abstract","notation":[{"@value":"<jats:title>Abstract</jats:title><jats:p>This paper presents a 591×438-DPI ultrasonic fingerprint sensor. The sensor is based on a piezoelectric micromachined ultrasonic transducer (PMUT) array that is bonded at wafer-level to complementary metal oxide semiconductor (CMOS) signal processing electronics to produce a pulse-echo ultrasonic imager on a chip. To meet the 500-DPI standard for consumer fingerprint sensors, the PMUT pitch was reduced by approximately a factor of two relative to an earlier design. We conducted a systematic design study of the individual PMUT and array to achieve this scaling while maintaining a high fill-factor. The resulting 110×56-PMUT array, composed of 30×43-μm<jats:sup>2</jats:sup> rectangular PMUTs, achieved a 51.7% fill-factor, three times greater than that of the previous design. Together with the custom CMOS ASIC, the sensor achieves 2 mV kPa<jats:sup>−1</jats:sup> sensitivity, 15 kPa pressure output, 75 μm lateral resolution, and 150 μm axial resolution in a 4.6 mm×3.2 mm image. To the best of our knowledge, we have demonstrated the first MEMS ultrasonic fingerprint sensor capable of imaging epidermis and sub-surface layer fingerprints.</jats:p>"}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1380294646199713668","@type":"Researcher","foaf:name":[{"@value":"Xiaoyue Jiang"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713669","@type":"Researcher","foaf:name":[{"@value":"Yipeng Lu"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713664","@type":"Researcher","foaf:name":[{"@value":"Hao-Yen Tang"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713670","@type":"Researcher","foaf:name":[{"@value":"Julius M. Tsai"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713665","@type":"Researcher","foaf:name":[{"@value":"Eldwin J. Ng"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713671","@type":"Researcher","foaf:name":[{"@value":"Michael J. Daneman"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713667","@type":"Researcher","foaf:name":[{"@value":"Bernhard E. Boser"}]},{"@id":"https://cir.nii.ac.jp/crid/1380294646199713666","@type":"Researcher","foaf:name":[{"@value":"David A. Horsley"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"20557434"}],"prism:publicationName":[{"@value":"Microsystems & Nanoengineering"}],"dc:publisher":[{"@value":"Springer Science and Business Media LLC"}],"prism:publicationDate":"2017-11-20","prism:volume":"3","prism:number":"1"},"reviewed":"false","dc:rights":["https://creativecommons.org/licenses/by/4.0","https://creativecommons.org/licenses/by/4.0"],"url":[{"@id":"https://www.nature.com/articles/micronano201759.pdf"},{"@id":"https://www.nature.com/articles/micronano201759"},{"@id":"http://www.nature.com/articles/micronano201759"}],"createdAt":"2017-11-20","modifiedAt":"2022-12-22","relatedProduct":[{"@id":"https://cir.nii.ac.jp/crid/1360021389824608128","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Fabrication of a piezoelectric micromachined ultrasonic transducer (PMUT) with dual heterogeneous piezoelectric thin film stacking"}]},{"@id":"https://cir.nii.ac.jp/crid/1360294643790591360","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Autonomous on-Chip Debugging for Sensors Based on AVR Microcontrollers"}]}],"dataSourceIdentifier":[{"@type":"CROSSREF","@value":"10.1038/micronano.2017.59"},{"@type":"CROSSREF","@value":"10.1088/1361-6439/ad2306_references_DOI_MIANwlQPWU0EHr4kilMafTirpZH"},{"@type":"CROSSREF","@value":"10.4236/jst.2021.112002_references_DOI_MIANwlQPWU0EHr4kilMafTirpZH"}]}