著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Volkan Şenay and Suat Pat and Şadan Korkmaz and Tuna Aydoğmuş and Saliha Elmas and Soner Özen and Naci Ekem and M. Zafer Balbağ,ZnO thin film synthesis by reactive radio frequency magnetron sputtering,Applied Surface Science,0169-4332,Elsevier BV,2014-11,318,,2-5,https://cir.nii.ac.jp/crid/1360294646489238784,https://doi.org/10.1016/j.apsusc.2013.10.044