著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
S. V. Berezhnoi and I. D. Kaganovich and L. D. Tsendin and V. A. Schweigert,Fast modeling of the low-pressure capacitively coupled radio-frequency discharge based on the nonlocal approach,Applied Physics Letters,0003-6951,AIP Publishing,1996-10-14,69,16,2341-2343,https://cir.nii.ac.jp/crid/1360294724480999680,https://doi.org/10.1063/1.117518