著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Kazumasa Takada and Masahiro Nakajo,Pickup lens inspection on the 5th order aberration using shearing interference by grating with curve fitting algorithm,Optical Review,1340-6000,Springer Science and Business Media LLC,2001-11,8,6,463,https://cir.nii.ac.jp/crid/1360298341225767552,https://doi.org/10.1007/bf02931736