著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Robert Bogue,The fast‐moving world of MEMS technology,Assembly Automation,0144-5154,Emerald,2009-09-25,29,4,313-320,https://cir.nii.ac.jp/crid/1360298344676186496,https://doi.org/10.1108/01445150910987718