Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Y. Isono and T. Namazu and T. Tanaka,AFM bending testing of nanometric single crystal silicon wire at intermediate temperatures for MEMS,Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090),,IEEE,2002-11-13,,,135-138,https://cir.nii.ac.jp/crid/1360303977178943360,https://doi.org/10.1109/memsys.2001.906497