著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tsuneo Terasawa and Takeshi Yamane and Toshihiko Tanaka and Teruo Iwasaki and Osamu Suga and Toshihisa Tomie,Actinic Mask Blank Inspection and Signal Analysis for Detecting Phase Defects Down to 1.5 nm in Height,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2009-06-01,48,6S,06FA04,https://cir.nii.ac.jp/crid/1360566396808200192,https://doi.org/10.1143/jjap.48.06fa04