Anisotropic Bond Orientation of Amorphous Carbon by Deposition
説明
<jats:p> In general, diamond-like carbon is classified on the basis of the sp<jats:sup>2</jats:sup>, sp<jats:sup>3</jats:sup>, and hydrogen contents, otherwise known as the ternary phase diagram of amorphous carbon. In this study, however, it has been found that there is still some structural difference even though amorphous carbons may be located at the same point on the ternary phase diagram. Bond orientations of two types of amorphous carbon, arising in the deposition and annealing processes, are investigated, and it is shown that the bond orientations are totally different from each other even though the sp<jats:sup>2</jats:sup>, sp<jats:sup>3</jats:sup>, and hydrogen contents are the same. </jats:p>
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 51 (1S), 01AC05-, 2012-01-01
IOP Publishing
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詳細情報 詳細情報について
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- CRID
- 1360566396810112128
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- NII論文ID
- 210000071674
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- ISSN
- 13474065
- 00214922
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