著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Ryosuke Matsui and Hiroyuki Kousaka and Noritsugu Umehara,Effect of Plasma-On Time on the Axial Distribution of Film Thickness in Internal Diamond-Like Carbon Coating with Microwave-Excited High-Density Plasma,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2013-11-01,52,11S,11NA01,https://cir.nii.ac.jp/crid/1360566399841580160,https://doi.org/10.7567/jjap.52.11na01