著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yusuke Tanaka and Tetsuo Harada and Tsuyoshi Amano and Youichi Usui and Takeo Watanabe and Hiroo Kinoshita,Characterization of small phase defects using a micro-coherent extreme ultraviolet scatterometry microscope,Japanese Journal of Applied Physics,0021-4922,IOP Publishing,2014-05-27,53,6S,06JC03,https://cir.nii.ac.jp/crid/1360566399842894208,https://doi.org/10.7567/jjap.53.06jc03