{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1360567184364038784.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.1088/0953-2048/28/3/035013"}},{"identifier":{"@type":"URI","@value":"http://stacks.iop.org/0953-2048/28/i=3/a=035013/pdf"}},{"identifier":{"@type":"URI","@value":"http://stacks.iop.org/0953-2048/28/i=3/a=035013?key=crossref.d435c032df9f3b7bf5092b32b430a65e"}}],"resourceType":"学術雑誌論文(journal article)","dc:title":[{"@value":"Fast and accurate inductance and coupling calculation for a multi-layer Nb process"}],"description":[{"notation":[{"@value":"Currently, fabrication processes for superconductive integrated circuits are moving to multiple wiring and shielding layers, some of which are placed below the main ground plane (GP) and device layers. The Advanced Industrial Science and Technology advanced process (ADP2) was the first such multi-layer Nb process with planarized passive transmission line and GP layers below the junction layer, and is at the time of writing still the most developed. This process allows complex circuit designs, and accurate inductance extraction helps to push the boundaries of the layouts possible. We show that the position of ground connections between ground layers influences the inductance of structures for which these GPs act as return path, and that this needs to be accounted for in modelling. However, due to the number of wiring layers and GPs, full layout modelling of large cells causes long calculation times. In this paper we discuss methods with which to reduce model size, and calibrate InductEx calculations using these methods against measured results. We show that model reduction followed by calibration results in fast calculation times while good accuracy is maintained. We also show that InductEx correctly handles coupling between conductors in a multi-layer layout, and how to model layouts to gauge unwanted coupling between power lines and single flux quantum electronics."}]}],"creator":[{"@id":"https://cir.nii.ac.jp/crid/1380567184364038913","@type":"Researcher","foaf:name":[{"@value":"Coenrad J Fourie"}]},{"@id":"https://cir.nii.ac.jp/crid/1380567184364038912","@type":"Researcher","foaf:name":[{"@value":"Akitomo Takahashi"}]},{"@id":"https://cir.nii.ac.jp/crid/1420001326223507200","@type":"Researcher","personIdentifier":[{"@type":"KAKEN_RESEARCHERS","@value":"70202398"},{"@type":"NRID","@value":"1000070202398"},{"@type":"ORCID","@value":"0000-0001-6191-6715"},{"@type":"NRID","@value":"9000380461873"},{"@type":"NRID","@value":"9000243892810"},{"@type":"NRID","@value":"9000414942233"},{"@type":"NRID","@value":"9000415343255"},{"@type":"NRID","@value":"9000392722749"},{"@type":"NRID","@value":"9000321422024"},{"@type":"NRID","@value":"9000282391725"},{"@type":"NRID","@value":"9000345197055"},{"@type":"NRID","@value":"9000254560223"},{"@type":"NRID","@value":"9000401638340"},{"@type":"NRID","@value":"9000365485935"},{"@type":"NRID","@value":"9000000648248"},{"@type":"NRID","@value":"9000017684711"},{"@type":"NRID","@value":"9000254561430"},{"@type":"NRID","@value":"9000321422011"},{"@type":"NRID","@value":"9000016879821"},{"@type":"NRID","@value":"9000021923483"},{"@type":"NRID","@value":"9000402413482"},{"@type":"NRID","@value":"9000380963291"},{"@type":"NRID","@value":"9000389547572"},{"@type":"NRID","@value":"9000345218672"},{"@type":"NRID","@value":"9000252968137"},{"@type":"NRID","@value":"9000402063229"},{"@type":"NRID","@value":"9000402913328"},{"@type":"NRID","@value":"9000380963297"},{"@type":"NRID","@value":"9000380963282"},{"@type":"NRID","@value":"9000391543252"},{"@type":"NRID","@value":"9000312724513"},{"@type":"NRID","@value":"9000324994446"},{"@type":"NRID","@value":"9000401611902"},{"@type":"NRID","@value":"9000399343402"},{"@type":"NRID","@value":"9000316198298"},{"@type":"NRID","@value":"9000291613659"},{"@type":"NRID","@value":"9000017683286"},{"@type":"NRID","@value":"9000016879733"},{"@type":"NRID","@value":"9000380963279"},{"@type":"NRID","@value":"9000403959146"},{"@type":"NRID","@value":"9000243892833"},{"@type":"NRID","@value":"9000252988259"},{"@type":"NRID","@value":"9000414942227"},{"@type":"NRID","@value":"9000401851483"},{"@type":"NRID","@value":"9000392736769"},{"@type":"NRID","@value":"9000004876621"},{"@type":"NRID","@value":"9000389547613"},{"@type":"NRID","@value":"9000324994481"},{"@type":"NRID","@value":"9000324994443"},{"@type":"NRID","@value":"9000401647909"},{"@type":"NRID","@value":"9000402061030"},{"@type":"NRID","@value":"9000356650542"},{"@type":"NRID","@value":"9000375847501"},{"@type":"NRID","@value":"9000378649031"},{"@type":"NRID","@value":"9000401616219"},{"@type":"NRID","@value":"9000401853184"},{"@type":"NRID","@value":"9000018658013"},{"@type":"NRID","@value":"9000004820182"},{"@type":"NRID","@value":"9000321421993"},{"@type":"NRID","@value":"9000267766943"},{"@type":"NRID","@value":"9000402913333"},{"@type":"NRID","@value":"9000380963285"},{"@type":"NRID","@value":"9000243892812"},{"@type":"NRID","@value":"9000016879456"},{"@type":"NRID","@value":"9000380963273"},{"@type":"NRID","@value":"9000258145364"},{"@type":"NRID","@value":"9000392697508"},{"@type":"NRID","@value":"9000392737013"},{"@type":"NRID","@value":"9000021416914"},{"@type":"NRID","@value":"9000397945833"},{"@type":"NRID","@value":"9000410265887"},{"@type":"NRID","@value":"9000369349720"},{"@type":"NRID","@value":"9000252973161"},{"@type":"NRID","@value":"9000243892851"},{"@type":"NRID","@value":"9000253327931"},{"@type":"NRID","@value":"9000401665057"},{"@type":"NRID","@value":"9000401604055"},{"@type":"NRID","@value":"9000258132072"},{"@type":"NRID","@value":"9000356650528"},{"@type":"NRID","@value":"9000380461876"},{"@type":"NRID","@value":"9000406328503"},{"@type":"NRID","@value":"9000411772363"},{"@type":"NRID","@value":"9000252976703"},{"@type":"NRID","@value":"9000413572126"},{"@type":"NRID","@value":"9000401637395"},{"@type":"NRID","@value":"9000399836065"},{"@type":"NRID","@value":"9000283335640"},{"@type":"NRID","@value":"9000382649726"},{"@type":"NRID","@value":"9000016879832"},{"@type":"NRID","@value":"9000282391716"},{"@type":"NRID","@value":"9000020250395"},{"@type":"NRID","@value":"9000380461864"},{"@type":"NRID","@value":"9000389547625"},{"@type":"NRID","@value":"9000414942165"},{"@type":"NRID","@value":"9000363908949"},{"@type":"NRID","@value":"9000392728037"},{"@type":"NRID","@value":"9000004876522"},{"@type":"NRID","@value":"9000016879839"},{"@type":"NRID","@value":"9000412100733"},{"@type":"NRID","@value":"9000380963309"},{"@type":"NRID","@value":"9000391526714"},{"@type":"NRID","@value":"9000243892840"},{"@type":"NRID","@value":"9000414520813"},{"@type":"NRID","@value":"9000401632451"},{"@type":"NRID","@value":"9000258129804"},{"@type":"NRID","@value":"9000402413479"},{"@type":"NRID","@value":"9000252985734"},{"@type":"NRID","@value":"9000401655111"},{"@type":"NRID","@value":"9000316198122"},{"@type":"NRID","@value":"9000336055629"},{"@type":"NRID","@value":"9000311055266"},{"@type":"NRID","@value":"9000392716009"},{"@type":"NRID","@value":"9000004816310"},{"@type":"NRID","@value":"9000408574668"},{"@type":"NRID","@value":"9000243892803"},{"@type":"NRID","@value":"9000242074086"},{"@type":"NRID","@value":"9000401623071"},{"@type":"NRID","@value":"9000107382932"},{"@type":"NRID","@value":"9000321422020"},{"@type":"NRID","@value":"9000282391721"},{"@type":"NRID","@value":"9000392843956"},{"@type":"NRID","@value":"9000397945839"},{"@type":"NRID","@value":"9000380963268"},{"@type":"NRID","@value":"9000380461870"},{"@type":"NRID","@value":"9000406328506"},{"@type":"NRID","@value":"9000318139020"},{"@type":"NRID","@value":"9000252766069"},{"@type":"NRID","@value":"9000401681879"},{"@type":"NRID","@value":"9000401653251"},{"@type":"NRID","@value":"9000392699183"},{"@type":"NRID","@value":"9000258126201"},{"@type":"RESEARCHMAP","@value":"https://researchmap.jp/nobuyuki_yoshikawa"}],"foaf:name":[{"@value":"Nobuyuki Yoshikawa"}]}],"publication":{"publicationIdentifier":[{"@type":"PISSN","@value":"09532048"},{"@type":"EISSN","@value":"13616668"}],"prism:publicationName":[{"@value":"Superconductor Science and Technology"}],"dc:publisher":[{"@value":"IOP Publishing"}],"prism:publicationDate":"2015-02-02","prism:volume":"28","prism:number":"3","prism:startingPage":"035013"},"reviewed":"false","dc:rights":["http://iopscience.iop.org/info/page/text-and-data-mining","http://iopscience.iop.org/page/copyright"],"url":[{"@id":"http://stacks.iop.org/0953-2048/28/i=3/a=035013/pdf"},{"@id":"http://stacks.iop.org/0953-2048/28/i=3/a=035013?key=crossref.d435c032df9f3b7bf5092b32b430a65e"}],"createdAt":"2015-02-02","modifiedAt":"2020-04-10","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=Materials%20Chemistry","dc:title":"Materials Chemistry"},{"@id":"https://cir.nii.ac.jp/all?q=Electrical%20and%20Electronic%20Engineering","dc:title":"Electrical and Electronic Engineering"},{"@id":"https://cir.nii.ac.jp/all?q=Metals%20and%20Alloys","dc:title":"Metals and Alloys"},{"@id":"https://cir.nii.ac.jp/all?q=Condensed%20Matter%20Physics","dc:title":"Condensed Matter Physics"},{"@id":"https://cir.nii.ac.jp/all?q=Ceramics%20and%20Composites","dc:title":"Ceramics and Composites"}],"project":[{"@id":"https://cir.nii.ac.jp/crid/1040282257257289216","@type":"Project","projectIdentifier":[{"@type":"KAKEN","@value":"26220904"},{"@type":"JGN","@value":"JP26220904"},{"@type":"URI","@value":"https://kaken.nii.ac.jp/grant/KAKENHI-PROJECT-26220904/"}],"notation":[{"@language":"ja","@value":"熱力学的極限に挑む断熱モード磁束量子プロセッサの研究"},{"@language":"en","@value":"Study on Adiabatic Single-Flux-Quantum Circuits Operating in the Thermodynamic Energy Limit"}]}],"relatedProduct":[{"@id":"https://cir.nii.ac.jp/crid/1360011143924252928","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Inductances of striplines and stacked vias in planarized multi-layer Nb circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1360011146446858880","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"New Nb multi-layer fabrication process for large-scale SFQ circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1360285708897245696","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@value":"Multi-excitation adiabatic quantum-flux-parametron"}]},{"@id":"https://cir.nii.ac.jp/crid/1360285710367522688","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Design and Implementation of Component Circuits of an SFQ Half-Precision Floating-Point Adder Using 10-kA/cm$^{2}$ Nb Process"}]},{"@id":"https://cir.nii.ac.jp/crid/1360285710367617280","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Development of Pulse Transfer Circuits for Serially Biased SFQ Circuits Using the Nb 9-Layer 1-$\\mu\\hbox{m}$ Process"}]},{"@id":"https://cir.nii.ac.jp/crid/1360292619442684800","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"The Effects of a DC Power Layer in a 10-Nb-Layer Device for SFQ LSIs"}]},{"@id":"https://cir.nii.ac.jp/crid/1360292619928048512","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"A design approach to passive interconnects for single flux quantum logic circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1360567183863933312","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Novel latch for adiabatic quantum-flux-parametron logic"}]},{"@id":"https://cir.nii.ac.jp/crid/1360574095682434560","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"European roadmap on superconductive electronics – status and perspectives"}]},{"@id":"https://cir.nii.ac.jp/crid/1361699995884275200","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Experimentally verified inductance extraction and parameter study for superconductive integrated circuit wires crossing ground plane holes"}]},{"@id":"https://cir.nii.ac.jp/crid/1361981469917855488","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"A New Design Methodology for Single-Flux-Quantum (SFQ) Logic Circuits Using Passive-Transmission-Line (PTL) Wiring"}]},{"@id":"https://cir.nii.ac.jp/crid/1361981470081849600","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Accurate measurement of small inductances or penetration depths in superconductors"}]},{"@id":"https://cir.nii.ac.jp/crid/1361981470259891584","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Grounding positions of superconducting layer for effective magnetic isolation in Josephson integrated circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1362825895016605696","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Energy-Efficient Superconducting Computing—Power Budgets and Requirements"}]},{"@id":"https://cir.nii.ac.jp/crid/1362825895162995072","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Effects of a DC-Power Layer Under a Ground Plane in SFQ Circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1363107368983269504","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Current status and future prospect of the Nb-based fabrication process for single flux quantum circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1363107371321526912","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Planarization Process for Fabricating Multi-Layer Nb Integrated Circuits Incorporating Top Active Layer"}]},{"@id":"https://cir.nii.ac.jp/crid/1363670319156112128","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Development of advanced Nb process for SFQ circuits"}]},{"@id":"https://cir.nii.ac.jp/crid/1363670320632142720","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"SFQ Circuits With Ground Plane Hole-Assisted Inductive Coupling Designed With InductEx"}]},{"@id":"https://cir.nii.ac.jp/crid/1364233269877802624","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"SFQ Propagation Properties in Passive Transmission Lines Based on a 10-Nb-Layer Structure"}]},{"@id":"https://cir.nii.ac.jp/crid/1364233270540824832","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@value":"Effects of the film thickness of a ground plane in the SFQ circuits with a dc-power layer"}]},{"@id":"https://cir.nii.ac.jp/crid/1390001204376271488","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["references"],"jpcoar:relatedTitle":[{"@language":"en","@value":"100 GHz Demonstrations Based on the Single-Flux-Quantum Cell Library for the 10 kA/cm2 Nb Multi-Layer Process"},{"@value":"100 GHz demonstrations based on the single-flux-quantum cell library for the 10 kA cm−2 Nb multi-layer process"}]},{"@id":"https://cir.nii.ac.jp/crid/1390001205213442048","@type":"Article","relationType":["references"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Numerical and experimental evaluation of mutual inductances between two superconducting striplines coupled through a superconducting intermediate layer"}]},{"@id":"https://cir.nii.ac.jp/crid/1390282679354176128","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["isReferencedBy"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Inductance and Current Distribution Extraction in Nb Multilayer Circuits with Superconductive and Resistive Components"}]},{"@id":"https://cir.nii.ac.jp/crid/1390282679354289280","@type":"Article","resourceType":"学術雑誌論文(journal article)","relationType":["references"],"jpcoar:relatedTitle":[{"@language":"en","@value":"Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation"}]}],"dataSourceIdentifier":[{"@type":"CROSSREF","@value":"10.1088/0953-2048/28/3/035013"},{"@type":"KAKEN","@value":"PRODUCT-20395124"},{"@type":"OPENAIRE","@value":"doi_dedup___::9b581e0b5929f37b3c80fa07dc88b77c"},{"@type":"CROSSREF","@value":"10.1587/transele.e99.c.683_references_DOI_7Ji95urdtIrYKU8mNpTcfWuajfL"},{"@type":"CROSSREF","@value":"10.1063/1.4979856_references_DOI_7Ji95urdtIrYKU8mNpTcfWuajfL"}]}